Semiconductor processing apparatus having lift and tilt mechanism
AssigneeSemitool, Inc.
InventorsKyle Hanson, Mark Dix, Vlad Zila, Daniel J. Woodruff
Life of this patent
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Abstract
A lift/tilt assembly for use in a semiconductor wafer processing device is set forth. The lift/tilt assembly includes a linear way comprising a fixed frame and a moveable frame. A nest for accepting a plurality of semiconductor wafers is rotatably connected to the moveable frame. The nest rotates between a wafer-horizontal orientation and a wafer-vertical orientation as it is driven with the movable frame by a motor that is coupled to the linear way. A lever connected to the nest provides an offset from true vertical for the nest when the nest is in the wafer-vertical orientation.
Claims11
A lift/tilt assembly for use in a semiconductor wafer processing device, said lift/tilt assembly comprising:
- a linear way comprising a fixed frame and a moveable frame;
- a nest rotatably connected to said movable frame, said nest rotating between a wafer-horizontal orientation and a wafer-vertical orientation;
- a motor coupled to said linear way;
- and
- a lever connected to said nest, said lever providing an offset from true vertical for said nest when said nest is in said wafer-vertical orientation.
Dependencies are inferred from the claim text.