Dual-spot phase-sensitive detection
AssigneeApplied Materials, Inc.
InventorHaim Feldman
Life of this patent
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Abstract
Apparatus for optical assessment of a sample includes a radiation source, adapted to generate a beam of coherent radiation, and traveling lens optics, adapted to focus the beam so as to generate first and second spots on a surface of the sample and to scan the spots together over the surface. Collection optics are positioned to collect the radiation scattered from the first and second spots and to focus the collected radiation so as to generate a pattern of interference fringes. A detector detects a change in the pattern of the interference fringes as the spots are scanned over the surface.
Claims24
Apparatus for optical assessment of a sample, comprising:
- a radiation source, adapted to generate a beam of coherent radiation;
- traveling lens optics, adapted to focus the beam so as to generate first and second spots on a surface of the sample and to scan the spots together over the surface;
- collection optics, positioned to collect the radiation scattered from the first and second spots and to focus the collected radiation so as to generate a pattern of interference fringes;
- and
- a detection unit, adapted to detect changes in the pattern of interference fringes.
A method for optical assessment of a sample, comprising:
- focusing a beam of coherent radiation so as to generate first and second spots on a surface of the sample and to scan the spots together over the surface;
- collecting the radiation scattered from the first and second spots and focusing the collected radiation so as to generate a pattern of interference fringes;
- and
- detecting changes in the pattern of the interference fringes.
Dependencies are inferred from the claim text.