Switchable capacitor and method of making the same
AssigneeInteruniversitair Microelektronica Centrum (IMEC)
InventorsXavier Rottenberg, Henri Jansen, Hendrikus Tilmans, Walter De Raedt
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Abstract
A micro electromechanical switchable capacitor is disclosed, comprising a substrate, a bottom electrode, a dielectric layer deposited on at least part of said bottom electrode, a conductive floating electrode deposited on at least part of said dielectric layer, an armature positioned proximate to the floating electrode and a first actuation area in order to stabilize the down state position of the armature. The device may furthermore comprise a second actuation area. The present invention provides shunt switches and series switches with actuation in zones attached to the floating electrode area or with relay actuation.
Claims19
A micro electromechanical switchable capacitor comprising:
- a bottom electrode;
- a dielectric layer deposited on at least a portion of said bottom electrode;
- a conductive floating electrode deposited on at least a portion of said dielectric layer;
- an armature positioned to form a first overlap region with said floating electrode, said first overlap region comprising the projection of the armature onto the floating electrode along a direction substantially perpendicular to the plane of the bottom electrode;
- a first actuation area comprising at least a portion of a second overlap region between said armature and an uncovered portion of said bottom electrode, wherein said second overlap region comprises a projection of said armature onto said bottom electrode along a direction substantially perpendicular to the plane of the bottom electrode.
Dependencies are inferred from the claim text.