Self aligned Hall with field plate
AssigneeHoneywell International Inc.
InventorIsaac D. Cohen
Life of this patent
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Abstract
A self aligned Hall sensor system and method are disclosed. A substrate can be provided. A Hall element and a plurality of contacts can then be formed upon the substrate wherein contacts are located in reference to one another. A field plate formed from polysilicon can then be formed upon the Hall element, wherein the field plate functions as a self-aligning mask for the plurality of contacts such that when the field plate is biased, a number of mobile carriers present at a surface of the field plate are minimized throughout the surface and up to and including the plurality of contacts, thereby minimizing asymmetry and offsets associated with the Hall element.
Claims11
A self aligned Hall sensor system, comprising:
- a substrate;
- a Hall element and a plurality of contacts formed upon said substrate wherein each contact among said plurality of contacts are located in reference to one another;
- and
- a field plate formed upon said Hall element, wherein said field plate functions as a self-aligning mask for said plurality of contacts.
A self aligned Hall sensor system, comprising:
- a substrate comprising silicon;
- a Hall element and a plurality of contacts formed upon said substrate wherein each contact among said plurality of contacts are located in reference to one another;
- an epitaxial layer formed upon said substrate for supporting said Hall element;
- an insulating layer placed over said Hall element;
- a conductive material is patterned over said insulating layer, wherein said conductive material comprises a polysilicon;
- and
- a field plate comprising polysilicon, wherein said field plate is formed upon said Hall element, such that said field plate functions as a self-aligning mask for said plurality of contacts such that when said field plate is biased, a number of mobile carriers present at a surface of said field plate are minimized throughout said surface and up to and including said plurality of contacts, thereby minimizing variation in offsets associated with said Hall element.
Dependencies are inferred from the claim text.