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US 7,002,144 B1Granted
Transfer line for measurement systems
AssigneeMicron Technology, Inc.
InventorsDavid Palsulich, Eric Swanson, Larry Weston, Kevin Coyle
Life of this patent
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AssigneeMicron Technology, Inc.
InventorsDavid Palsulich, Eric Swanson, Larry Weston, Kevin Coyle
Estimating the term…
An enhanced transfer system that increases the accuracy and sensitivity of a measurement system is disclosed. In one embodiment, the transfer system includes transfer tubing that transports samples from a spray chamber to an ionizer in a mass spectrometer system. The transfer system also includes a transfer gas line that is connected to the transfer tubing. The transfer gas line supplies a gas that assists with the transferring of the samples from the spray chamber to the ionizer. In one embodiment, the transfer gas line is angled relative to a portion of the transfer tubing. In another embodiment, the transfer gas line is perpendicular relative to a portion of the transfer tubing. The injected gas increases the quantity and quality of the samples transferred to the mass spectrometry system, thereby increasing the overall accuracy and sensitivity of the measurement system.
A transfer system comprising:
A conveyance system comprising:
A transfer system comprising:
An ionizer transport system comprising:
A method for transferring an aerosol through a transfer line, the method comprising adding a transfer gas to a transfer line at an angle with respect to a portion of the transfer line, wherein the angle is between approximately 30 degrees to approximately 60 degrees.
A method for measuring a sample in a semiconductor processing system, comprising:
A method of transferring an analyte comprising supplying a carrier gas an angle that ranges between approximately 30 degrees to approximately 60 degrees with respect to tubing that transfers the analyte from a spray chamber to an ionizer.
A transfer system comprising:
Dependencies are inferred from the claim text.