Heater inspection apparatus and semiconductor manufacturing apparatus having heater inspection apparatus mounted thereon

A heater inspection apparatus comprising:

• an applying unit that applies an electrical power to a heater based on an AC power source;
• a current detector that detects a current flowing through the heater when the electrical power is applied to the heater by said applying unit;
• a voltage detector that detects a voltage applied to the heater when the electrical power is applied to the heater by said applying unit;
• a temperature detector that detects a temperature of the heater;
• a memory on which a temperature coefficient of resistance for use in calculation of a resistance of the heater at a reference time is stored in advance;
• a first calculating unit that calculates a resistance of the heater at an inspection time based on respective detection results of said voltage detector and said current detector;
• a second calculating unit that calculates the resistance of the heater at the reference time based on a detection result of said temperature detector and the temperature coefficient of resistance stored on said memory;
• and
• a finding unit that finds a deterioration degree of the heater based on the resistance of the heater at the inspection time calculated by said first calculating unit and the resistance of the heater at the reference time calculated by said second calculating unit.