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US 7,001,794 B2Granted
Focal plane arrays in type II-superlattices
AssigneeMP Technologies, LLC
InventorManijeh Razeghi
Life of this patent
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Abstract
The subject invention comprises a type-II superlattice photon detector and focal planes array and method for making. The device may be either a binary or tertiary system with a type-II band alignment.
Claims8
A method of preparing an infrared detector comprising the steps of:
- a) growing a type-II superlattice structure on a GaSb substrate;
- b) fabricating detector pixels;
- c) passivating the detector pixels with a passivation layer;
- d) patterning and etching the passivation layer;
- e) preparing metallic contacts;
- f) fabricate indium bumps;
- g) flip-chip bonding the substrate with a Si-based ROIC on a ROIC substrate or GaAs or InP based ROIC on a ROIC substrate;
- and
- h) underfilling between the substrate and the ROIC substrate;
- thereby creating an infrared Focal Plane Array detector based on a type-II superlattice.
7 more elements
Dependencies are inferred from the claim text.