Resist compositions and patterning process
AssigneesShin-Etsu Chemical Co., Ltd., Matsushita Electric Industrial Co., Ltd., Central Glass Company, Limited
InventorsJun Hatakeyama, Yuji Harada, Yoshio Kawai, Masaru Sasago, Masayuki Endo, Shinji Kishimura, Kazuhiko Maeda, Haruhiko Komoriya, Kazuhiro Yamanaka
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Abstract
A resist composition comprising a blend of a cyclic polymer having alcoholic groups as soluble groups and a polymer having carboxyl or hexafluoroalcohol groups whose hydrogen atoms are replaced by acid labile groups as a base resin forms a resist film which is improved in transparency, alkali dissolution contrast and plasma etching resistance.
Claims8
A resist composition comprising a polymer comprising recurring units of the general formula (1) and a polymer comprising recurring units of the general formula (2):
- wherein R1 and R2 each are hydrogen or an acid labile group, letters a and b are numbers satisfying 0≦a≦1, 0≦b≦1 and 0.3≦a+b≦1, R3 is an acid labile group, R4 and R5 are each independently hydrogen, an alkyl group of 1 to 4 carbon atoms which may be substituted with a fluorine atom, cyano group or hydroxy group, or an acid labile group, R6 is hydrogen, an alkyl group of 1 to 4 carbon atoms which may be substituted with a fluorine atom, cyano group or hydroxy group, or an acid labile group, X1 is a single bond, methylene group or ethylene group, letters c, d, e and f are numbers satisfying 0≦c<0.8, 0<d<0.8, 0<c+d<0.8, 0≦e<0.8, 0≦f<0.8, 0<e+f<0.8, and 0.5≦c+d+e+f≦1.
Dependencies are inferred from the claim text.