Method and apparatus for doping semiconductors
AssigneeEvergreen Solar, Inc.
InventorsMary C. Cretella, Richard L. Wallace, Jr.
Life of this patent
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Abstract
Semiconductor materials such as silicon particles are doped by mixing the semiconductor material with a solution having a dopan and a solvent. The solvent is removed from the wetted surface of the particles of the semiconductor material, thereby yielding particles that are substantially free from the solvent and are uniformly coated with the dopant.
Claims21
A method for doping a semiconductor material, the method comprising the steps of:
- a. providing particles of a semiconductor material;
- b. contacting a doping solution that comprises a dopant and a solvent with the particles of the semiconductor material to uniformly wet the surface of the particles of the semiconductor material with the doping solution;
- and
- c. removing the solvent from the wetted surface of the particles of the semiconductor material, thereby yielding particles of the semiconductor material substantially free from solvent and uniformly coated with the dopant.
A method for doping silicon, the method comprising the steps of:
- a. providing silicon particles;
- b. providing a doping solution comprising at least one dopant and at least one low boiling solvent;
- c. mixing the silicon particles and the doping solution to uniformly wet the silicon particles with the doping solution;
- d. heating the wetted silicon particles under reduced pressure to remove the at least one low boiling solvent from the surface of the silicon particles, thereby yielding silicon particles substantially free from the at least one low boiling solvent and is uniformly coated with the at least one dopant;
- and
- e. melting the silicon particles to form a homogeneous mixture of silicon and the at least one dopant.
A method for growing a silicon ribbon, the method comprising the steps of:
- a. providing silicon particles of a semiconductor material;
- b. contacting a doping solution that comprises at least one dopant and a solvent with the particles of the semiconductor material to uniformly wet the surface of the particles of the semiconductor material with the doping solution;
- c. removing the solvent from the wetted surface of the particles of the semiconductor material, thereby yielding particles of the semiconductor material substantially free from solvent and uniformly coated with the at least one dopant;
- d. feeding the doped silicon particles into a crucible comprising a melt of silicon;
- and
- e. growing a silicon crystal ribbon from the melt of silicon with string stabilization being employed at the edges of the ribbon, the silicon crystal ribbon comprising the at least one dopant.
A method for doping a semiconductor material, the method comprising the steps of:
- a. providing particles of a semiconductor material;
- b. providing a doping solution that comprises a dopant and an alcohol;
- c. mixing the particles of the semiconductor material with the doping solution to form a mixture;
- d. heating the mixture to vaporize the alcohol, thereby yielding particles of the semiconductor material substantially free from the alcohol and coated with the dopant.
A method of coating silicon pellets with boron dopant for use in adding dopant to a silicon melt comprising the steps of:
- combining a measured quantity of silicon pellets with a solution comprising boron, polymer precursor, and a volatile solvent so as to form a mixture thereof;
- heating said mixture to a temperature at which the solvent evaporates but at which the boron is substantially unaffected;
- and
- evaporating the solvent completely whereby a polymeric coating containing the boron is formed on the surfaces of the pellets.
A method of coating silicon particles with boron dopant for use in adding the dopant to a silicon melt comprising the steps of:
- combining in a container (1) a spin-on dopant solution comprising boron and (2) a measured quantity of silicon pellets so as to form a mixture thereof;
- heating said mixture to a temperature at which a solid boron-containing coating is formed on the pellets;
- moving the pellets as they are being heated;
- and
- terminating the heating after the solution has been substantially evaporated and the pellets are dry.
Dependencies are inferred from the claim text.