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US 7,001,257 B2Granted
Multi-chamber carrier head with a flexible membrane
AssigneeApplied Materials, Inc.
InventorsHung Chih Chen, Steven M. Zuniga
Life of this patent
Estimating the term…
Abstract
A carrier head that has a base assembly and a flexible membrane. The flexible membrane has a generally circular main portion with a lower surface that provides a substrate-mounting surface and a plurality of concentric annular portions extending from the main portion and secured to the base assembly. The volume between the base assembly and the flexible membrane forming a plurality of pressurizable chambers.
Claims15
A carrier head, comprising:
- a base assembly;
- and
- a flexible membrane having a generally circular main portion with a lower surface that provides a substrate-mounting surface and a plurality of concentric flexible annular flaps secured to the base assembly, the volume between the base assembly and the flexible membrane forming a plurality of pressurizable chambers;
- wherein at least one of the annular flaps is configured to reduce downward load transmitted from at least one of the chambers through the annular flap of the flexible membrane to the main portion so as to reduce compressions in the main portion.
1 more element
A carrier head, comprising:
- a base assembly;
- and
- a flexible membrane having a generally circular main portion with a lower surface that provides a substrate-mounting surface and a plurality of concentric annular portions extending from the main portion and secured to the base assembly, the volume between the base assembly and the flexible membrane forming a plurality of pressurizable chambers, and a means for reducing downward load transmitted from at least one of the chambers through at least one of the annular portions of the flexible membrane to the main portion so as to reduce compressions in the main portion.
A flexible membrane for a carrier head, comprising:
- a generally circular main portion with a lower surface that provides a substrate-mounting surface;
- and
- a plurality of concentric flexible annular flaps to form a plurality of pressurizable chambers when the flexible membrane is secured to a base assembly of a carrier head;
- wherein at least one of the annular flaps is configured to reduce downward load transmitted from at least one of the chambers through the annular flap of the flexible membrane to the main portion so as to reduce compressions in the main portion.
1 more element
Dependencies are inferred from the claim text.