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US 7,001,256 B2Granted
Carrier head with a non-stick membrane
AssigneeApplied Materials, Inc.
InventorsSteven M. Zuniga, Hung Chih Chen
Life of this patent
Estimating the term…
Abstract
A carrier head for chemical mechanical polishing of a substrate includes a base and a flexible membrane extending beneath the base to define a chamber. The flexible membrane has a core of a first material and an outer layer of a second material having a lower adhesion to the substrate than the first material. An exposed surface of the outer layer provides a mounting surface for the substrate.
Claims14
A method of moving a substrate with a carrier head, comprising:
- positioning a substrate against a mounting surface of a flexible membrane of a carrier head, the flexible membrane defining a pressurizable chamber within the carrier head, the flexible membrane including a low adhesion material to which the substrate does not readily adhere;
- evacuating the chamber to form a seal between the mounting surface and the substrate;
- placing the substrate on a receiving surface;
- and
- pressurizing the chamber to break the seal between the substrate and the mounting surface.
2 more elements
A method of making a flexible membrane for a carrier head, comprising:
- providing a core formed of a first material;
- depositing a second material onto the core to form a layer, the layer providing a mounting surface for a substrate, the second material having a lower adhesion to the substrate than the first material.
Dependencies are inferred from the claim text.