Methods and systems for processing a bevel edge of a substrate using a dynamic liquid meniscus
AssigneeLam Research Corporation
InventorsCarl A. Woods, James P. Garcia, John M. de Larios
Life of this patent
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Abstract
A system and method for processing an edge of a substrate includes an edge roller and a first proximity head. The first proximity head being mounted on the edge roller. The first proximity head capable of forming a meniscus and including a concave portion and multiple ports opening into the concave portion. The concave portion being capable of receiving an edge of a substrate and the ports including at least one process liquid injection port, at least one vacuum port and at least one surface tension control port.
Claims11
A system for processing an edge of a substrate comprising:
- an edge roller;
- a first proximity head mounted on the edge roller, the first proximity head capable of forming a meniscus, the first proximity head including:
- a concave portion, the concave portion capable of receiving an edge of a substrate;
- and
- a plurality of ports opening into the concave portion, the plurality of ports including:
- at least one process liquid injection port;
- at least one vacuum port;
- and
- at least one surface tension control port.
A system for processing an edge of a substrate comprising:
- an edge roller mounted on a first axis;
- a first proximity head mounted on a second axis, the second axis being concentric with the first axis, the first proximity head capable of forming a meniscus, the first proximity head including:
- a concave portion, the concave portion capable of receiving an edge of a substrate;
- and
- a plurality of ports opening into the concave portion, the plurality of ports including:
- at least one process liquid injection port;
- at least one vacuum port;
- and
- at least one surface tension control port;
- and
- an actuator coupled to the second axis, the actuator capable of moving the second axis the axis capable of being rotated independently from the first axis.
Dependencies are inferred from the claim text.