Variable capacitance measuring device

Abstract

A variable capacitance measuring device can comprise any one or more features in various different embodiments allow a reliable, compact device to be achieved. A capacitor electrode, a gettering housing, and pinch-off connector may be aligned along a common axis may reduce width dimensions without a substantial increase in length. Temperature-induced variations may be reduced by selecting materials that have coefficients of thermal expansion relatively closer to one another. Substantially varying topologies for ceramic-metal interfaces may reduce the likelihood of external contaminants from reaching the evacuated portion of the device. A tube can be used between the capacitor portion and a gettering housing to isolate external forces and getter activation heat from the sensor. The same tube also reduces heat loss from a heated sensor and protects the electronics from overheating. Embodiments also include processes for using and forming the devices.

Dependencies are inferred from the claim text.