Strain sensor patterned on MEMS flex arms

A micromechanical assembly couplable to a member, the micromechanical device comprising:

• a body positionable in a fluid flow by the member, the body having an aerodynamic surface subject to aerodynamic forces from interaction of the aerodynamic surface with the fluid flow;
• a substrate including a beam joining a first substrate portion that is attachable to the member to a second substrate portion that is attachable to the body;
• the substrate including a substrate surface extending at least over the beam;
• a pattern formed at the substrate surface, the pattern including first and second circuit elements that sense flexing of the beam due to the varying forces;
• contact pads coupled to the pattern and;
• a measurement circuit coupled to the contact pads, the measurement circuit providing an output as a function of the aerodynamic forces.

A test fixture, comprising:

• a body portion adapted to attach to a member;
• a floating portion including a leading edge, a trailing edge and a test platform therebetween;
• a body attached to the floating portion, the body being positionable in a fluid flow and having an aerodynamic surface subject to aerodynamic forces from interaction of the aerodynamic surface with the fluid flow;
• a plurality of beams having a leading edge, a trailing edge and an elongated length therebetween, the plurality of beams being interposed between the body portion and the floating body portion to flex in response to movement of the floating portion relative to the body portion;
• and
• a plurality of sensors on the beams to sense flexure of the plurality of beams, the plurality of sensors providing a sensor output as a function of the aerodynamic forces.