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US 7,000,434 B2Granted
Method of creating an angled waveguide using lithographic techniques
AssigneeIntel Corporation
InventorVenkatesan Murali
Life of this patent
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Abstract
A waveguide having an angled surface is created by depositing an optical core material onto a substrate having two levels. In one embodiment, a high density plasma deposition may be used to deposit the optical core material.
Claims4
A method of making a waveguide comprising:
- depositing an optical cladding material on the first side of a substrate;
- etching the optical cladding material to form a wall substantially normal to the substrate;
- and
- depositing an optical core material onto the substrate and the optical cladding material to form an angled surface, wherein the angled surface is in optical alignment with a photonic via that extends from the first side of the substrate straight through the substrate to an opposite side of the substrate.
1 more element
Dependencies are inferred from the claim text.