Cooling apparatus and plasma processing apparatus having cooling apparatus

A cooling apparatus comprising:

• a primary refrigerant circulating circuit which allows a primary refrigerant whose temperature is adjusted by a heat exchanger to circulate into an electrode and adjusts a temperature of said electrode, and which has a first check valve for allowing said primary refrigerant to flow into said electrode, a second check valve allowing said primary refrigerant to flow out from said electrode, and a purge valve capable of bringing said primary refrigerant into communication with a purge gas path,
• a secondary refrigerant circulating circuit which supplies a secondary refrigerant to said heat exchanger to adjust a temperature of said primary refrigerant, and
• a freezing circuit through which a tertiary refrigerant circulates said heat exchanger being interposed in said secondary refrigerant circulating circuit, said freezing circuit adjusting a temperature of said secondary refrigerant by said tertiary refrigerant, a temperature detector for detecting temperatures of said primary refrigerant and said secondary refrigerant, and a control system for actuating, only when necessary, said freezing circuit in accordance with a detected temperature value of at least one of said primary refrigerant and said secondary refrigerant,
• wherein a second control system is configured to prevent the freezing circuit from operating when the cooling apparatus is an energy-saving mode.