Ceramic device
AssigneeNGK Insulators, Ltd.
InventorsYukihisa Takeuchi, Tsutomu Nanataki, Koji Kimura, Masao Takahashi
Life of this patent
Estimating the term…
Abstract
A ceramic device has an actuator element which includes a shape-retaining layer, an upper electrode formed on an upper portion of the shape-retaining layer, and a lower electrode formed on a lower portion of the shape-retaining layer. A vibrating section of ceramics supports the actuator element and a fixed section of ceramics vibratingly supports the vibrating section. An electrode material of the lower electrode contacting the vibrating section contains an additive in an amount of 0.01% by weight to 20% by weight. The electrode material contains platinum as a major component, for example. The additive to the electrode material is preferably zirconium oxide, cerium oxide, or titanium oxide.
Claims8
A ceramic device comprising:
- an operating section having at least a pair of electrodes formed on a shape-retaining layer, said shape-retaining layer comprising one of a piezoelectric/electrostrictive layer and an anti-ferroelectric layer;
- a vibrating section comprising a ceramic supporting said operating section, at least one electrode of said electrodes contacting said vibrating section;
- and
- a fixed section comprising a ceramic vibratingly supporting said vibrating section;
- wherein said vibrating section, said electrode contacting said vibrating section, and said shape-retaining layer are integrally fired;
- and
- wherein at least said electrode contacting said vibrating section comprises an electrode material containing a minute amount of an additive having an average particle diameter of 0.01 to 1.0 μm when said additive is at least one material selected from the group consisting of zirconium oxide, cerium oxide, and hafnium oxide;
- wherein said additive has an average particle diameter of 0.1 to 10.0 μm when said additive is at least one material selected from the group consisting of titanium oxide, the material of the piezoelectric/electrostrictive layer, and the material of the anti-ferroelectric layer;
- and
- wherein said additive is contained in said electrode material in an amount of 0.1 wt % to 5 wt %.
Dependencies are inferred from the claim text.