Back to results
US 6,998,571 B2Granted
Laser beam processing machine
AssigneeDisco Corporation
InventorsKazuma Sekiya, Toshiyuki Yoshikawa
Life of this patent
Estimating the term…
Abstract
A laser beam processing machine comprising a chuck table for holding a workpiece and a laser beam application means for applying a laser beam to the workpiece held on the chuck table, wherein the machine further comprises a protective film forming means for forming a protective film on the to-be-processed surface of the workpiece before laser beam processing.
Claims5
A laser beam processing machine comprising a chuck table for holding a workpiece and a laser beam application means for applying a laser beam to the workpiece held on the chuck table,
- wherein the machine further comprises a protective film forming means for forming a protective film on a surface of the workpiece to-be-processed before the laser beam processing, and
- wherein the protective film forming means comprises a spinner table that holds the workpiece and rotates, and a resin solution supply means for supplying a liquid resin solution to the to-be-processed surface of the workpiece held on the spinner table.
Dependencies are inferred from the claim text.