Pyrotechnic microactuators for microsystems
AssigneeSNPE Materlaux Energetiques
InventorsChristian Perut, Denis Roller
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Abstract
The technical field of the invention is that of microactuators designed for mechanical, chemical, electrical or thermal functions in microsystems, for microelectronic applications such as chips, or biomedical applications such as cards incorporating microfluidics. The invention concerns a microactuator comprising a chamber machined in a solid support and containing a pyrotechnic charge. Said microactuator is essentially characterised in that the chamber is partly delimited by a deformable membrane, such that the gases emitted by combustion of the pyrotechnic charge enable to increase the volume of said chamber by deforming said membrane while maintaining intact the solid walls of the chamber.
Claims16
A microactuator comprising a chamber produced in the form of a cavity in a solid support and containing a pyrotechnic charge, said chamber being partially delimited by a deformable membrane so that the gases emitted by the combustion of the pyrotechnic charge allow the volume of said chamber to increase by deforming said membrane, while at the same time leaving the solid walls of the chamber intact, characterized in that the pyrotechnic charge is deposited on a heating conductor and has a deposition thickness of less than 200 μm.
Dependencies are inferred from the claim text.