Graphical user interface with process quality indicator

A semiconductor manufacturing system comprising:

• a process tool;
• a sensor that senses a process parameter;
• a processor that processes data related to a semiconductor manufacturing process;
• and
• a display configured to graphically display an icon representing a wafer, at least one of the location and color of the icon on the display indicating the process quality of the manufacturing process and a stage of processing for the represented wafer.

A semiconductor manufacturing system comprising:

• a process tool;
• a sensor that senses a process parameter;
• a processor that processes data related to a semiconductor manufacturing process;
• and
• a display configured to graphically display an icon representing a wafer, at least one of the location and color of the icon on the display indicating the process quality of the manufacturing process for the represented wafer,
• wherein the display mechanism is configured to display concentric circles, the circles indicating different process quality of the manufacturing process,
• wherein an innermost one of the concentric circles indicates a highest process quality, a next outermost one of the concentric circles indicates a lesser process quality, and a still next outermost one of the concentric circles indicates a still lesser process quality,
• wherein the displaying mechanism is configured to display the icon in the concentric circle corresponding to the process quality of the manufacturing process for the represented wafer,
• wherein each of the concentric circles has a different color.

A semiconductor manufacturing system comprising:

• a process tool;
• a sensor that senses a process parameter;
• a processor that processes data related to a semiconductor manufacturing process;
• and
• a display configured to graphically display an icon representing a wafer, at least one of the location and color of the icon on the display indicating the process quality of the manufacturing process for the represented wafer,
• wherein the displaying mechanism is configured to display a grid with an X-axis and a Y-axis, the position of the icon in the grid in the X-direction indicating a first measure of the process quality of the manufacturing process for the represented wafer and the position of the icon in the grid in the Y-direction indicating a second measure of the process quality of the manufacturing process for the represented wafer
• wherein the displaying mechanism is configured to display the icon in different colors, the different colors representing acceptability of the process quality of the manufacturing process for the represented wafer.

A computer program product for supporting a terminal for enabling a user to graphically observe a measure of process quality of a manufacturing process, comprising:

• at least one sequence of computer executable instructions;
• and
• a computer readable memory medium bearing the executable instructions in computer readable form, wherein execution of the instructions by a processor causes the terminal to:
• display a screen having areas corresponding to process quality of the manufacturing process;
• and
• generate an icon on the display representative of a workpiece subjected to the manufacturing process;
• and
• position the icon on the display in an area corresponding to the process quality and a stage of processing of the represented workpiece.