Ultra fine particle film forming method and apparatus
AssigneeSecretary of Agency of Industrial Science and Technology
InventorJun Akedo
Life of this patent
Estimating the term…
Abstract
A ultra fine particle film forming apparatus is provided which is capable of forming a ultra fine particle film which has ultra fine particles sufficiently bonded together, sufficient density, flat surface and uniform density. A planarized ultra fine particle film forming method for forming a planarized ultra fine particle film from a deposited film of ultra fine particles formed by supplying the ultra fine particles to a substrate, the method comprising one or more of a planarizing step of planarizing a surface of the deposited film of the ultra fine particles supplied to the substrate.
Claims9
A planarized ultra fine particle film forming method for forming a planarized ultra fine particle film from a deposited film of ultra fine particles formed by supplying the ultra fine particles to a substrate, the method comprising a planarizing step of planarizing a surface of the deposited film of the ultra fine particles by blowing planarizing fine particles having a grinding/polishing function at an oblique incidence angle toward the surface of the deposited film.
A planarized ultra fine particle film forming apparatus for forming a planarized ultra fine particle film from a deposited film of ultra fine particles, the planarized film forming apparatus comprising a substrate for holding a film, a nozzle for supplying ultra fine particles to the substrate to form a deposited film, and a spray apparatus that lets out planarizing fine particles towards the deposited film to planarize the film of the ultra fine particles on the substrate, wherein the planarizing fine particles from the spray apparatus have a grinding/polishing function and are blown at an oblique incidence angle toward the surface of the deposited film.
Dependencies are inferred from the claim text.