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US 6,989,921 B2Granted
Magnetically actuated micro-electro-mechanical apparatus and method of manufacture
AssigneeCorning Incorporated
InventorsJonathan Bernstein, William P. Taylor, Gregory A. Kirkos, Marc Waelti
Life of this patent
Estimating the term…
Abstract
An array of magnetically actuated MEMS mirror devices is provided having stationary magnets configured to provide strong magnetic fields in the plane of the mirrors without any magnets or magnet-system components in the plane of the mirrors. Also, a magnetically actuated mirror device is provided that includes an improved actuation coil configuration that provides greater torque during mirror actuation. In addition, a mechanism is provided to detect the angular deflection of a moveable mirror. Also, an improved process is provided for manufacturing MEMS mirror devices.
Claims41
An array of electro-magnetically actuated MEMS devices, each device comprising:
- a mirror having a reflective surface;
- a gimbal structure for movably supporting said mirror about first and second axes;
- a first coil pair on the mirror for causing selective movement of said mirror about the first axis in the presence of a magnetic field;
- and
- a second coil pair on the mirror for causing selective movement of said mirror about the second axis in the presence of a magnetic field,
- each of said first and second coil pairs substantially filling the area of the mirror covered by the reflective surface.
3 more elements
A magnetically actuated mirror array apparatus, comprising:
- an array of electro-magnetically actuated MEMS devices, each device comprising:
- a mirror having a reflective surface;
- a gimbal structure for movably supporting said mirror about first and second axes;
- a first coil pair on the mirror for causing selective movement of said mirror about the first axis in the presence of a magnetic field;
- and a second coil pair on the mirror for causing selective movement of said mirror about the second axis in the presence of a magnetic field, each of said first and second coil pairs substantially filling the area of the mirror covered by the reflective surface;
- and
- an array of magnets positioned proximate said array of MEMS devices for applying the magnetic field, each magnet of said array being associated with one or more of said mirror devices.
4 more elements
A magnetically actuated mirror array apparatus, comprising:
- an array of mirror devices generally arranged in a plane, each mirror device comprising:
- a mirror;
- a gimbal structure for movably supporting said mirror about first and second axes;
- and actuation coils for causing selective movement of said mirror about the first and second axes;
- and
- an array of magnets generally arranged in a plane proximate and parallel to said plane of said mirror device array, with each magnet being associated with one or more of said mirror devices, wherein said magnets include a first set of magnets having poles perpendicular to the plane of said mirror device array, and a second set of magnets having poles parallel to said plane of said mirror device array, and wherein said magnets of said first set are arranged between magnets of said second set.
3 more elements
A MEMS apparatus comprising:
- an array of electromagnetically actuated MEMS devices arranged in rows on a substrate;
- and
- an array of magnets positioned along a plane parallel to said substrate, said array of magnets including magnets along each row of devices having a pole direction parallel to said substrate, and magnets between each row of devices having a pole direction perpendicular to said substrate such that said devices are within a magnetic field produced by said array of magnets.
An electro-magnetically actuated MEMS device, comprising:
- a mirror having a reflective surface;
- a gimbal structure for movably supporting said mirror about first and second axes;
- a first coil pair on the mirror for causing selective movement of said mirror about the first axis in the presence of a magnetic field;
- and
- a second coil pair on the mirror for causing selective movement of said mirror about the second axis in the presence of a magnetic field,
- each of said first and second coil pairs substantially filling the area of the mirror covered by the reflective surface.
3 more elements
An electro-magnetically actuated MEMS mirror array apparatus, comprising:
- (a) an array of mirror devices, each comprising:
- a mirror having a reflective surface;
- a gimbal frame for movably supporting said mirror about first and second axes;
- a first coil on the mirror;
- and
- a second coil on the gimbal frame, said first and second coils for causing selective movement of said mirror about the first and second axes in the presence of a magnetic field, said first coil substantially filling the area of the mirror covered by the reflective surface;
- and
- (b) an array of magnets positioned proximate said devices for applying the magnetic field, each magnet of said array being associated with one or more of said mirror devices, wherein said magnets have poles parallel to a plane on which said array of mirror devices is arranged.
5 more elements
An electro-magnetically actuated MEMS mirror array apparatus, comprising:
- (a) an array of mirror devices, each comprising:
- a mirror having a reflective surface;
- a gimbal frame for movably supporting said mirror about first and second axes;
- a first coil on the mirror;
- and
- a second coil on the gimbal frame, said first and second coils for causing selective movement of said mirror about the first and second axes in the presence of a magnetic field, said first coil substantially filling the area of the mirror covered by the reflective surface;
- and
- (b) an array of magnets positioned proximate said devices for applying the magnetic field, each magnet of said array being associated with one or more of said mirror devices, wherein said magnets include a first set of magnets having poles perpendicular to a plane on which said array of mirror devices is arranged, and a second set of magnets having poles parallel to said plane, and wherein said magnets of said first set are arranged between magnets of said second set.
5 more elements
Dependencies are inferred from the claim text.