Vibration-attenuation devices having low lateral stiffness, and exposure apparatus comprising same

A device for supporting a first mass relative to a second mass, the device comprising:

• a fluid isolator and a fluid bearing situated along a support axis between the first mass and the second mass;
• the fluid isolator comprising a housing defining an isolator chamber configured to be pressurized with a fluid at a predetermined pressure sufficient to support the first mass relative to the second mass along the support axis;
• and
• the fluid bearing being situated and configured to allow relative movement between the first and second masses in a direction that intersects the support axis, the fluid bearing comprising first and second bearing surfaces oriented relative to the support axis, at least one of the first and second bearing surfaces defining a first pressure conduit and a second pressure conduit, the first pressure conduit being situated the closest of the conduits to the isolator chamber and pressurized at a first pressure substantially equal to the predetermined pressure of the fluid isolator, the second pressure conduit being situated the farthest of the conduits from the isolator chamber and pressurized at a second pressure less than the first pressure.

A device for supporting a first mass relative to a second mass, the device comprising:

• a first housing coupled to the first mass, the first housing defining a first chamber configured to be pressurized with a first fluid;
• a second housing coupled to the second mass and situated along a support axis relative to the first housing between the first and second masses, the second housing defining a second chamber configured to be pressurized with a second fluid, the second chamber being fluidly disconnected from the first chamber;
• and
• a fluid bearing defined between the first and second housings, the fluid bearing allowing movement of the first and second masses relative to each other in a direction that intersects the support axis.