Micro-electromechanical actuators
AssigneeElectronics and Telecommunications Research Institute
InventorsJong Soo Ko, Dae Sik Lee, Myung Lae Lee, Chi Hoon Jun, Youn Tae Kim
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Abstract
The present invention relates to a micro-electromechanical actuator. An electromagnetic-type micro-electromechanical actuator of the present invention has a conductive beam formed in a micro electronic substrate on an upper side of a magnetic substance, so that the conductive beam can be moved toward an in-plane mode in parallel to the micro electronic substrate depending on a direction that current flows. Therefore, the micro-electromechanical actuator can be applied to most of electromagnetic micro-electromechanical systems that require an in-plane mode.
Claims15
A micro-electromechanical actuator, comprising:
- a micro electronic substrate having an upper and a lower surface;
- a permanent magnetic substance formed on the lower surface of said micro electronic substrate to generate a magnetic field perpendicular to the upper surface of the micro electronic substrate;
- and
- at least one conductive beam formed on the upper surface of said micro-electronic substrate, each conductive beam including end portions and a connection portion, said at least one conductive beam being fixed at said end portions and being movable at said connection portion, the end portions being connected to electrodes;
- wherein the connection portion of the at least one conductive beams is movable perpendicular to the conductive beam, in a plane parallel to the upper surface of said micro electronic substrate by means of Lorentz force due to an electromagnetic force of said magnetic substance by applying current to the conductive beam through the electrodes.
Dependencies are inferred from the claim text.