Interactive threshold tuning
AssigneeKLA-Tencor Technologies Corporation
InventorsChien-Huei Chen, Vivek Bhagat, Qiang Song, James A. Quigley, Ashok V. Kulkarni
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Abstract
A method of tuning an inspection system. An inspection piece is sensed and analyzed to identify anomalies. Level information is analyzed with an initial set of thresholds, and an initial portion of the anomalies are flagging as defects. The inspection system parameters are changed, and the level information is analyzed with a modified set of thresholds. The anomalies are flagged as defects based on the immediately preceding analysis of the level information. The steps of changing the thresholds and reflagging the defects are repeated as desired, and the modified set of thresholds are stored for use in an inspection system recipe.
Claims19
A method of tuning an inspection system, the method comprising the steps of:
- a. sensing characteristics of an inspection piece using the inspection system,
- b. analyzing the sensed characteristics to identify anomalies having location information and level information,
- c. analyzing the level information of the anomalies with an initial set of thresholds of inspection system parameters,
- d. flagging as defects an initial portion of the anomalies based on the analysis of the level information in step c,
- e. displaying a summary of the flagged anomalies,
- f. selectively changing at least one of the inspection system parameters to form a modified set of thresholds of the inspection system parameters,
- g. analyzing the level information of the anomalies with the modified set of thresholds of the inspection system parameters,
- h. flagging as defects an updated portion of the anomalies based on the analysis of the level information in step g,
- i. displaying a summary of the flagged anomalies,
- j. selectively repeating steps f through i, and
- k. storing the modified set of thresholds of the inspection system parameters for use in an inspection system recipe.
A method of tuning a recipe for an inspection system, the method comprising the steps of:
- a. receiving level information for sensed anomalies,
- b. analyzing the level information of the anomalies with an initial set of thresholds of inspection system parameters,
- c. flagging as defects an initial portion of the anomalies based on the analysis of the level information in step b,
- d. displaying a summary of the flagged anomalies,
- e. selectively changing at least one of the inspection system parameters to form a modified set of thresholds of the inspection system parameters,
- f. analyzing the level information of the anomalies with the modified set of thresholds of the inspection system parameters,
- g. flagging as defects an updated portion of the anomalies based on the analysis of the level information in step f,
- h. displaying a summary of the flagged anomalies,
- i. selectively repeating steps e through h, and
- j. storing the modified set of thresholds of the inspection system parameters for use in an inspection system recipe.
An inspection system comprising:
- sensors adapted to sense characteristics of an inspection piece,
- a processor adapted to:
- analyze the sensed characteristics to identify anomalies having location information and level information,
- analyze the level information of the anomalies with an initial set of thresholds of inspection system parameters, and
- flag as defects an initial portion of the anomalies based on the analysis of the level information,
- a display adapted to:
- display a summary of the flagged anomalies,
- an input adapted to selectively change at least one of the inspection system parameters to form a modified set of thresholds of the inspection system parameters,
- the processor further adapted to:
- analyze the level information of the anomalies with the modified set of thresholds of the inspection system parameters, and
- flag as defects an updated portion of the anomalies based on the immediately preceding analysis of the level information,
- the display further adapted to display an updated summary of the flagged anomalies, and
- a memory adapted to store the modified set of thresholds of the inspection system parameters for use in an inspection system recipe.
Dependencies are inferred from the claim text.