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US 6,985,058 B2Granted
Lorentz force assisted switch
AssigneeThe Johns Hopkins University
InventorsWilliam P. D'Amico, John L. Champion, Gabriel M. Rebeiz, Dennis K. Wickenden, Robert B. Givens
Life of this patent
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Abstract
A Lorentz force assisted microelectromechanical switch is provided which is configured to have a capacitive switch and an electrical conductor placed in transversely extending electric and magnetic fields to generate the Lorentz force sufficient to operate the capacitive switch.
Claims7
A switching device comprising:
- a capacitive switch;
- a magnetic field source operative to apply a magnetic field across the switch;
- and
- an electrical conductor providing there along a path of conduction of a current in opposite directions, the electrical conductor being juxtaposed with the capacitive switch and extending transversely to the magnetic field for triggering the capacitive switch between an on- and off-state in accordance with a direction of current flow along the electrical conductor,
- wherein the capacitive switch is an electrostatic switch, the switching device being a microelectromechanical Lorentz-force assisted switching device,
- wherein the electrostatic switch is configured to have a pull-down electrode continuously supported by a substrate and a bridge straddling the pull-down electrode and being operative to move towards and away from the pull-down electrode in accordance with the direction of current flow along the electrical conductor to selectively set the on- and off-state of the capacitive switch,
- wherein the bridge has a central body elevated above the pull-down electrode in the off-state of the capacitive switch and spaced apart pads coupled to the central body and supported on the substrate, and
- wherein the bridge further includes multiple hinges having a width narrower than a width of the central body and extending between the central body and the pads.
5 more elements
A switching device comprising:
- a capacitive switch;
- a magnetic field source operative to apply a magnetic field across the switch;
- and an electrical conductor providing there along a path of conduction of a current in opposite directions, the electrical conductor being juxtaposed with the capacitive switch and extending transversely to the magnetic field for triggering the capacitive switch between an on- and off-state in accordance with a direction of current flow along the electrical conductor,
- wherein the capacitive switch is an electrostatic switch, the switching device being a microelectromechanical Lorentz-force assisted switching device,
- wherein the electrostatic switch is configured to have a pull-down electrode continuously supported by a substrate and a bridge straddling the pull-down electrode and being operative to move towards and away from the pull-down electrode in accordance with the direction of current flow along the electrical conductor to selectively set the on- and off-state of the capacitive switch,
- wherein the electrical conductor is provided on a top surface of the bridge, and
- wherein the electrical conductor has a frame configured to have a pair of spaced-apart strips or wires attached to the bridge of the electrostatic switch and end supports bridging the spaced apart strips or wires and formed on the substrate.
4 more elements
A microelectromechanical system (MEMS) switch comprising:
- a substrate;
- multiple contacts spaced from one another and supported by the substrate;
- and
- a capacitive switching assembly provided on the substrate and positionable in magnetic and electrical fields extending coplanar with but transversely to one another to generate a Lorentz force applied to the capacitive switching assembly to selectively short the multiple contacts,
- wherein the capacitive switching assembly is an electrostatic switch including
- a pull-down electrode fixed to the substrate,
- a flexible bridge having opposite ends, which flank the pull-down electrode, and a central body extending between the opposite ends and facing the pull-down electrode, and
- a flexible conductor extending on top of and coupled to the bridge so that the coupled flexible conductor and bridge provide a path of conduction of a current between the multiple contacts, the magnetic filed extending coplanar with the flexible bridge but transversely to the path of conduction, whereas the Lorentz force is produced and extends in a plane lying substantially perpendicular to a plane of the flexible bridge.
5 more elements
Dependencies are inferred from the claim text.