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US 6,985,051 B2Granted
Micromechanical resonator device and method of making a micromechanical device
AssigneeThe Regents of the University of Michigan
InventorsClark T.-C. Nguyen, Mohamed A. Abdelmoneum
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Abstract
A micromechanical resonator device and a method of making the micromechanical resonator device, as well as other extensional mode devices are provided wherein anchor losses are minimized by anchoring at one or more side nodal points of the resonator device. Lower damping forces are experienced by the resonator device when operated in air.
Claims21
A micromechanical resonator device having a desired mode shape, the device comprising:
- a substrate;
- a resonator having a stationary surface area wherein the desired mode shape is characterized by a plurality of peripheral nodal points located about a periphery of the resonator and wherein the desired mode shape involves movement of only a fraction of the stationary surface area at resonance;
- and
- a non-intrusive support structure anchored to the substrate to support the resonator above the substrate and attached to the resonator at at least one of the peripheral nodal points to reduce mechanical losses to the substrate.
1 more element
Dependencies are inferred from the claim text.