Method for making a micro-electro-mechanical gyroscope

A method for manufacturing a micro-electro-mechanical gyroscope, comprising:

• providing a piezoelectric substrate;
• forming a pattern having a plurality of apertures therethrough;
• and
• fabricating, using said pattern, a plurality of features on said substrate, said features comprising:
• a resonator transducer for creating a first surface acoustic wave on said surface;
• a pair of reflectors for reflecting said first surface acoustic wave to form a standing wave within a first region of said surface between said pair of reflectors;
• a structure within said region, wherein a Coriolis force acting upon said structure creates a second surface acoustic wave;
• and
• a first sensor transducer disposed on said surface for sensing said second surface acoustic wave;
• and
• a second sensor transducer disposed on said surface for sensing a residual surface acoustic wave from a second region of said surface that is free of any structure that said Coriolis force can act upon, and for providing an output indicative of said residual surface acoustic wave.