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AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorHsueh Chi Shen
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A system and method for detecting a fault and identifying a remedy for the fault in real-time in a semiconductor product manufacturing facility are provided. In one example, the method includes importing data from a manufacturing device and data representing a plurality of different manufacturing devices into an analysis tool. The imported data is analyzed using the analysis tool to determine if a fault exists in the manufacturing device's operation and, if a fault exists, the fault is classified and a remedy for the fault is identified based at least partly on the classification. Configuration data used to control the manufacturing device may be updated, and the update may apply the remedy to the configuration information. The manufacturing device's operation may then be modified using the updated configuration data.
A computer-executable method for detecting a fault and identifying a remedy for the fault in real-time in a semiconductor product manufacturing facility, the system comprising:
A system for real-time fault detection and classification in a semiconductor product manufacturing facility, the system comprising:
Dependencies are inferred from the claim text.