Condensation particle counter
AssigneeHyundai Calibration & Certification Technologies Co., Ltd.
InventorsKang-Ho Ahn, Sang-Soo Kim, Hae-Young Jeong
Life of this patent
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Abstract
A condensation particle counter measures the number of ultra-fine particles by growing the ultra-fine particles through a condensing process. The counter includes a capillary in which vapor of operating liquid is condensed and the ultra-fine particles grow. An insulating material surrounds the capillary to shut out heat flow between the capillary and the environment. The condensation particle counter can use various operating liquids including alcohol and water, and can be also applied to semiconductor clean rooms.
Claims18
A condensation particle counter, comprising:
- a storage pool with an operating liquid contained therein;
- a saturator integrally formed with the storage pool and having an absorbing member provided therein to come into contact with the operating liquid for absorbing the operating liquid and a heater installed at an outer wall thereof for forming the operating liquid into vapor;
- a capillary located downstream of the saturator for condensing the vapor therein to grow particles;
- an optical instrument installed adjacent to an outlet of the capillary for counting the grown particles;
- and
- a suction means located downstream of the capillary for sucking the grown particles thereinto;
- said counter further comprising the operating liquid, wherein a temperature of the vapor of said operating liquid in said capillary is reduced substantially through adiabatic expansion of the vapor, rather than through heat exchange with the environment.
A condensation particle counter, consisting essentially of:
- a storage pool with an operating liquid contained therein;
- a saturator in fluid communication with the storage pool, said saturator having an absorbing member in contact with the operating liquid for absorbing the operating liquid and a heater for converting the operating liquid into vapor;
- a capillary tube located downstream of the saturator for condensing the vapor on particles to form and grow droplets around the particles;
- an optical instrument installed adjacent to an outlet of the capillary for counting the grown droplets;
- a suction source located downstream of the capillary tube for sucking the grown droplets out of the capillary tube;
- and
- an insulator for insulating the capillary tube from a surrounding environment;
- wherein said suction source is configured to lower a pressure of the vapor within said capillary tube to a pressure level sufficient to cause a supersonic flow in said capillary tube and to reduce a temperature of the vapor of said operating liquid in said capillary substantially through adiabatic expansion of the vapor, rather than through heat exchange with the environment.
A condensation particle counter, comprising:
- a storage pool with an operating liquid contained therein;
- a saturator in fluid communication with the storage pool for converting the operating liquid into vapor;
- a capillary tube located downstream of the saturator for condensing the vapor on particles to form and grow droplets around the particles, wherein said capillary tube has opposite first and second ends and a middle section positioned between said ends and continuous to both said ends;
- an optical instrument installed adjacent to the first end of the capillary for counting the grown droplets;
- a suction source located downstream of the capillary tube for sucking the grown droplets out of the capillary tube;
- and
- an insulator for insulating the capillary tube from a surrounding environment;
- wherein said first and second ends of the capillary tube extend through outer walls of said saturator and said optical instrument, respectively, and said middle section extending between said outer walls, an entirety of said middle section being substantially free of heat exchange with the environment due to said insulator.
Dependencies are inferred from the claim text.