Design data format and hierarchy management for phase processing

A method of handling flat data for phase processing, the flat data including a plurality of shapes, the method comprising:

• partitioning the plurality of shapes into a plurality of bins;
• growing the shapes within each of the plurality of bins to identify clusters, wherein a cluster comprises a subset of shapes from the plurality of shapes identified as overlapping after the growing;
• preparing a phase shifting layout for the flat data by phase shifting each of the plurality of clusters independently of one another;
• and
• detecting identical clusters within each bin before preparing the phase shifting layout.

A method of handling flat data for phase processing, the flat data including a plurality of shapes, the method comprising:

• partitioning the plurality of shapes into a plurality of bins;
• growing the shapes within each of the plurality of bins to identify clusters, wherein a cluster comprises a subset of shapes from the plurality of shapes identified as overlapping after the growing;
• preparing a phase shifting layout for the flat data by phase shifting each of the plurality of clusters independently of one another;
• and
• detecting identical clusters during preparing the phase shifting layout.

A method of handling flat data for phase processing, the flat data including a plurality of shapes, the method comprising:

• partitioning the plurality of shapes into a plurality of bins;
• growing the shapes within each of the plurality of bins to identify clusters, wherein a cluster comprises a subset of shapes from the plurality of shapes identified as overlapping after the growing;
• preparing a phase shifting layout for the flat data by phase shifting each of the plurality of clusters independently of one another;
• and
• detecting identical clusters within multiple bins.

A computer data signal embodied on a carrier wave comprising:

• a plurality of clusters corresponding to layout data, wherein each cluster represents a plurality of shapes in the layout data, the plurality of shapes having a predetermined proximity to each other, wherein the plurality of clusters are phase shifted independently of one another, and
• wherein the predetermined proximity is determined by at least one of:
• using a grow technique, wherein certain edges of each shape are extended a predetermined amount;
• using an endcap technique, wherein a line end is not grown;
• and
• using a diagonal corner technique, wherein a corner of a shape is grown the predetermined amount.