Three dimensional microfabrication
AssigneeMassachusetts Institute of Technology
InventorsPaul M. George, Robert S. Langer, David A. Lavan
Life of this patent
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Abstract
Method for making three-dimensional structures. A template is provided having at least two conductive regions separated by a non-conductive region. The template is disposed in an electrolyte in an electrodeposition cell and a voltage is established between one of the conductive regions and an electrode in the cell. Material is deposited on the one of the conductive regions connected to the voltage and subsequently bridges to the other conductive region with material deposition continuing on both of the at least two regions. The non conductive region may be a gap and the gap dimension is selected to regulate height differences between the at least two conductive regions.
Claims14
Method for making three-dimensional structures comprising:
- providing a template having at least two conductive regions separated by a non-conductive region;
- disposing the template in an electrolyte in an electrodeposition cell;
- and
- establishing a voltage between only one of the conductive regions and an electrode in the cell, whereby material is deposited on the one of the conductive regions connected to the voltage and subsequently bridges to the other conductive regions with material deposition continuing on both of the at least two regions.
Dependencies are inferred from the claim text.