Particle forming methods
AssigneeMicron Technology, Inc.
InventorTrung Tri Doan
Life of this patent
Estimating the term…
Abstract
A particle forming method includes feeding a first set of precursors to a first energy application zone. Energy is applied to the first set of precursors in the first energy application zone effective to react and form solid particles from the first set of precursors. The application of any effective energy to the solid particles is ceased, and the solid particles and a second set of precursors are fed to a second energy application zone. Energy is applied to the second set of precursors in the second energy application zone effective to react and form solid material about the solid particles from the second set of precursors. At least one precursor is fed to at least one of the first and second energy application zones as a liquid. Other aspects are contemplated.
Claims30
A particle forming method comprising:
- feeding a first set of precursors to a first energy application zone;
- first applying energy to the first set of precursors in the first energy application zone effective to react and form solid particles from the first set of precursors;
- ceasing application of any effective energy to the solid particles and feeding the solid particles and a second set of precursors to a second energy application zone;
- second applying energy to the second set of precursors in the second energy application zone effective to react and form solid material about the solid particles from the second set of precursors;
- at least one precursor being fed to at least one of the first and second energy application zones as a liquid.
A particle forming method comprising:
- providing a reaction flow path comprising a plurality of energy application zones;
- feeding a first set of precursors to a first in sequence of the energy application zones along the reaction flow path;
- applying energy to the first set of precursors in the first in sequence of the energy application zones effective to react and form solid particles from the first set of precursors;
- feeding the solid particles and a second set of precursors to a subsequent in sequence of the energy application zones along the flow path;
- feeding an inert purge gas to the reaction flow path intermediate the first in sequence and the subsequent in sequence energy application zones;
- and
- applying energy to the subsequent in sequence of the energy application zones effective to react and form solid material about the solid particles from the second set of precursors.
Dependencies are inferred from the claim text.