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US 6,975,920 B2Granted
In-situ randomization and recording of wafer processing order at process tools
AssigneeTexas Instruments Incorporated
InventorsRandolph W. Kahn, Kenneth G. Vickers, Richard L. Guldi, Edward J. Leonard, Yaojian Leng
Life of this patent
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Abstract
Wafer order is randomized in-situ by use of a separate wafer staging area and randomly shuffling wafers to and from this staging area to shuffle the processing order of the wafer lot. Positional data is captured for each wafer at both the send and receive ends of the process.
Claims5
A fabrication method, comprising the steps of:
- varying the history of wafers within a lot by transporting individual wafers thereof within a processing tool with multiple processing chambers, among said chambers and wafer cassette and/or staging locations in various different sequences randomly.
Dependencies are inferred from the claim text.