Electrical scanning probe microscope apparatus
AssigneeNational Applied Research Labratories
InventorMao-Nan Chang
Life of this patent
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Abstract
An electrical scanning probe microscope (SPM) apparatus. The SPM apparatus is equipped with an atomic force microscope with long-wavelength laser source to acquire topographic images and an electrical scanning sensor operatively coupled to the atomic force microscope to acquire synchronous two-dimensional electrical images. The photoperturbation effects induced by stray light and perturbation of the contrast of SCM images can be ameliorated.
Claims4
An electrical scanning probe microscope apparatus for synchronously acquiring two-dimensional differential capacitance images and corresponding topographic images, comprising:
- a sample stage;
- a scanning probe device comprising a cantilever and a conductive probe at the free end of the cantilever;
- a topographic image device operatively coupled to the scanning probe device comprising a long-wavelength laser source, a detector corresponding to the long-wavelength laser source, and a calibration device for calibrating the position of the long-wavelength laser source;
- and
- a controller, for controlling the position of the scanning probe device;
- and
- an electrical scanning capacitance sensor device to form a synchronous two dimensional electrical image.
Dependencies are inferred from the claim text.