MEMS-based, computer systems, clock generation and oscillator circuits and LC-tank apparatus for use therein

A MEMS-based oscillator circuit comprising:

• a substrate;
• a MEMS LC-tank apparatus fabricated on the substrate with a CMOS-compatible process;
• first circuitry fabricated on the substrate with the CMOS-compatible process and coupled to the LC-tank apparatus to generate a sinusoidal periodic signal having an original frequency;
• and
• second circuitry fabricated on the substrate with the CMOS-compatible process and coupled to the first circuitry to convert the sinusoidal periodic signal to a plurality of square-wave periodic signals having a corresponding plurality of application frequencies, each application frequency of the plurality of application frequencies equal to the original frequency divided by an integer.

A MEMS-based, LC-tank apparatus having a high quality factor, the apparatus comprising:

• a substrate;
• at least one micromachined, parallel plate varactor fabricated on the substrate with a CMOS-compatible process in conductive layers;
• a micromachined inductor coupled to the at least one varactor and also fabricated on the substrate with the CMOS-compatible process in a conductive layer of the conductive layers;
• wherein the varactor has a first predetermined size and the inductor has a second predetermined size to generate a stable sinusoidal signal having a high original frequency during oscillation;
• and
• circuitry coupled to the varactor and the inductor to divide the high original frequency, by a factor of two, to a lower application frequency.

A computer system comprising:

• a databus;
• a central processing unit coupled bi-directionally to the databus;
• transient memory coupled bi-directionally to the databus;
• persistent memory coupled bi-directionally to the databus;
• and
• a clock generation circuit for generating a stable, square-wave digital output signal suitable for use within said computer system, the clock generation circuit comprising:
• an oscillator fabricated on a substrate and including a EMS-based, LC-tank apparatus for generating a sinusoidal periodic signal having a first frequency;
• and
• first circuitry fabricated on the substrate for converting the sinusoidal periodic signal into a plurality of high frequency square-wave digital output signals each having a second frequency, the second frequency equal to the first frequency divided by an integer.

A clock generation circuit, the circuit comprising:

• a substrate;
• a MEMS-based, LC-tank oscillator fabricated on the substrate for generating a periodic sinusoidal signal having an original frequency;
• first circuitry fabricated on the substrate for converting the periodic signal into a high frequency, square-wave digital output signal having a frequency of half of the original frequency;
• and
• second circuitry fabricated on the substrate for dividing the frequency of the square-wave digital output signal to at least one lower application frequency.

A MEMS-based, oscillator circuit for generating a low noise, high frequency, periodic signal, the oscillator circuit comprising:

• a substrate;
• a high-Q MEMS LC-tank apparatus fabricated on the substrate with a CMOS-compatible process, the LC-tank comprising at least one micromachined varactor having a capacitance which varies in response to the control input and having a top plate;
• and
• circuitry fabricated on the substrate with the CMOS-compatible process and coupled to the LC-tank apparatus to generate the periodic signal and including a bypass capacitor to block the control input to the top plate from the remainder of the circuitry.

A MEMS-based, LC-tank apparatus having a high quality factor, the apparatus comprising:

• a substrate;
• at least one micromachined varactor fabricated on the substrate with a CMOS-compatible process, the at least one micromachined varactor having a variable capacitance to provide a tuning range for the apparatus, the at least one micromachined varactor comprising a fixed bottom plate and a movable top plate suspended above the bottom plate, wherein the top plate has a plurality of etch holes to facilitate release of the top plate during or upon completion of the CMOS-compatible process;
• and
• a micromachined inductor coupled to the at least one varactor and fabricated on the substrate with the CMOS-compatible process.

An integrated clock generation circuit, comprising:

• an oscillator circuit fabricated on a substrate for generating a first, differential periodic signal having a first frequency, the oscillator circuit comprising an inductor coupled to a capacitor;
• an amplifier fabricated on the substrate and coupled to the oscillator to convert the first, differential periodic signal to a single-ended signal having a second frequency;
• and
• a frequency divider circuit fabricated on the substrate and coupled to the amplifier to convert the single-ended signal to a plurality of square-wave periodic application signals, each periodic application signal having a different frequency equal to the second frequency divided by an integer.

An integrated clock generation circuit, comprising:

• a double-balanced LC-tank oscillator circuit fabricated from a CMOS-compatible process on a substrate, the LC-tank oscillator circuit for generating a stable differential periodic signal having a first frequency, the LC-tank oscillator circuit comprising an inductor and a capacitor fabricated from one or more CMOS-compatible layers;
• an amplifier fabricated from a CMOS-compatible process on the substrate and coupled to the L-C tank oscillator circuit to convert the differential periodic signal to a single-ended signal having a second frequency;
• and
• a frequency divider circuit fabricated on the substrate and coupled to the amplifier to convert the single-ended signal to a plurality of square-wave periodic application signals, each periodic application signal having a different frequency equal to the second frequency divided by an integer, wherein a periodic application signal of the plurality of square-wave periodic application signals is a clock signal.