Flexible recipe modeling and recipe cluster management system
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsHsien-Jung Hsu, Chin-Yen Lin, Hsiang-Jui Cheng
Life of this patent
Estimating the term…
Abstract
A flexible recipe modeling system and method is provided for improving the processing reliability of a fabrication process by customizing recipes processed by fabrication equipment including associated different chambers of a multi-chamber processing machine by allowing a responsible engineer to add or modify individual recipe clusters including grouping of recipes into clusters to represent the same process capacity for a piece of fabrication equipment and providing a material execute system having a recipe cluster management engine (RCME) for management of the RCMS.
Claims15
A recipe cluster management system comprising:
- a material execute system having a recipe cluster management engine in operative communication with the material execute system;
- a specification database in operative communication with the material execute system for storing predefined recipe clusters, wherein each recipe cluster has at least one associated recipe parameter and a specified location;
- a run time floor database, the run time floor database in operative communication with a real time dispatching system for sequencing processing of orders according to a predefined schedule, wherein the real time dispatching system is in further operative communication with the material execute system;
- at least one piece of fabrication equipment, wherein the at least one piece of fabrication equipment is in operative communication with the material execute system and wherein the at least one piece of fabrication equipment has an operator interface that allows an operator to monitor only candidate lots provided to the at least one piece of fabrication equipment by the RTD system, and to track the candidate lots into the at least one piece of fabrication equipment according to a predefined schedule;
- and
- an associated graphical user interface for assigning recipe clusters to associated chambers within the at least one piece of fabrication equipment wherein said associated graphical user interface comprises:
- an equipment setup menu for assigning the recipe clusters to the associated chambers within the piece of fabrication equipment,
- a select chamber menu for associating recipe clusters with a chamber disposed within the at least one piece of fabrication equipment,
- a candidate recipe cluster menu for displaying and selecting candidate recipe clusters, and
- a recipe list menu for displaying a recipe list associated with a candidate recipe cluster.
Dependencies are inferred from the claim text.