Methods for patterning polymer films, and use of the methods
AssigneeThin Film Electronics ASA
InventorsOlle Inganäs, Tobias Nyberg, Tomas Granlund
Life of this patent
Estimating the term…
Loading patent…
AssigneeThin Film Electronics ASA
InventorsOlle Inganäs, Tobias Nyberg, Tomas Granlund
Estimating the term…
In a method for patterning a polymer film forming a coating on a material surface, a thin film of polymer is deposited on the surface and the patterning takes place by applying to the material surface a stamp made of an elastomeric material in conformal contact with the surface of the thin film, such that portions thereof contacting one or more protruding elements of the elastomeric stamp formed by one or more indentations thereof, are attached to the protruding element or elements and removed from the material surface with the stamp. In a method for transferring a patterned polymer film onto a material surface, a thin film polymer is deposited on a stamp surface and the stamp is applied in conformal contact with the material surface, such that thin film of polymer is transferred thereto from one or more protruding elements of the elastomeric stamp formed by at least one indentation thereof, thus leaving a patterned thin film of polymer on the material surface when removing the stamp therefrom. Use for patterning an etched resist in the form of a thin film of polymer on a gold layer.
A method for patterning a polymer film forming a coating on a material surface, wherein the patterning takes place by means of a stamp made of an elastomer material and having a surface with at least one indentation formed therein, said method comprising the steps of
A method for transferring a patterned polymer film onto a material surface by means of a stamp made of an elastomer and having a surface with at least one indentation formed therein, said method comprising the steps of
Dependencies are inferred from the claim text.