Pressure sensor
AssigneePresens AS
InventorBjörn Erik Seeberg
Life of this patent
Estimating the term…
Abstract
A pressure gauge is arranged to function on the outside of a measuring element. The measuring element has a central cavity and is constituted by at least to parts, which are tightly joined for creation of the cavity. The measuring element has sensor organs for determining the mechanical state of stress of the measuring element during pressure influence. The two parts of the measuring element are manufactured with planar techniques, preferably by silicon or quarts with the cavity running in the longitudinal direction. The central cavity has a considerably greater height than width. The sensor organs have form of piezo-resistive elements arranged near an outer surface of the measuring element.
Claims18
A pressure gauge comprising:
- a measuring element comprising at least two parts joined at a joining plane such that a central cavity running in a longitudinal direction of said measuring element is formed;
- and
- a plurality of sensor devices operable to sense a mechanical state of stress of said measuring element under pressure influence, said plurality of sensor devices being arranged on a surface of said measuring element parallel with the joining plane,
- wherein a cross section of the central cavity has a height at least five times greater than a width, the height of the cross section being defined as a direction perpendicular to the joining plane, and the width of the cross section being perpendicular to the height.
Dependencies are inferred from the claim text.