US 6,963,072 B2 · Integral lens for high energy particle flow, method for producing such lenses and use thereof in analysis devices and devices for radiation therapy and lithography

Abstract

The invention makes possible to increase the degree of radiation focusing by the lens, to use particles of higher energies, and to increase the coefficients, depending on these factors, of the devices, the lens is used in. Thus the sublens 18 of the least degree of integration represents a package of the channels 5, which is growing out of joint drawing and forming the capillaries, which are laid in a bundle. The sublens of each higher degree of integration represents a package of sublenses of the previous degree of integration, which is growing out of their joint drawing and forming. The sublenses are growing out of performing the said operations at the pressure of the gaseous medium inside the channels being higher than the pressure in the space between the sublenses of the previous degree of integration and at the temperature of their material softening and splicing the walls. To produce the lenses a bundle of stocks (capillaries) in a tubular envelope is fed to the furnace (at the first stage) or stocks, produced on the previous degree, and the bundle is drawing from the furnace at the speed, exceeding the speed of feeding. The product is cut off on stocks for the next stage, and at the final stage the product is formed by varying the drawing speed, after what the parts with formed barrel-shaped thickenings are cut of.

Claims12

Dependent claims

A method for producing lenses for transforming radiation representing a neutral or charged particle flux, including radiation transporting channels with the use of a total external reflection in them, having two or more stages of stocks which produce, at each stage, a tubular envelope filled with earlier made stocks, wherein thin-walled capillaries are used at a first stage, and at each further stage the stocks are used for subsequent stages to complete a product, the method comprising:

the stocks, resulting from a given stage, are produced by cutting the product, emerging from the furnace, lengthwise,
wherein at an end of the stage of stocks a tubular envelope is filled with the stocks, obtained at this stage, and they are jointly drawn in the furnace at a feed speed maintained slower than an exit speed of the product from the furnace, and a relationship between the feed speed and exit speed of the product is periodically changed to form barrel-shaped thickenings on the product emerging from the furnace,
then lenses as parts of the product are produced from the product by cutting it lengthwise, and the lenses include only one thickening,
wherein at all stages the tubular envelopes, made of a same material as the capillaries, or a material having substantially the same thermal extension coefficient, are used and the processes of the tubular envelopes drawing with the stocks, filling the envelopes, occurs while a pressure of the gaseous medium in the space between them is less than the pressure inside channels of the stocks, at a temperature of the material that softens and splices neighboring stocks.

1 more element

A method for producing lenses for transforming radiation representing a neutral or charged particle flux, including radiation transporting channels with a use of a total external reflection in them, the method and two or more stages of stocks which produce, at each stage, a tubular envelope filled with earlier made stocks, wherein thin-walled capillaries are used at a first stage, and at each further stage the stocks are used for subsequent stages to complete a product, the method comprising:

the stocks, resulting from a given stage, are produced by cutting the product, emerging from the furnace, lengthwise,
wherein at the end of the stage of stocks the tubular envelope is filled with the stocks, obtained at this stage, and they are jointly drawn in the furnace at a feed speed maintained slower than an exit speed of the product from the furnace, and the relationship between the feed speed and exit speed of the product is periodically changed to form barrel-shaped thickenings on the product emerging from the furnace,
then the lenses as parts of the product are produced from this product by cutting it lengthwise, and the lenses include only one thickening,
wherein at all stages the tubular envelopes, made of a same material as the capillaries, or a material having substantially the same thermal extension coefficient, are used and the processes of the tubular envelopes drawing with the stocks, filling the envelopes, occurs while the pressure of the gaseous medium in the space between them is less than the pressure inside the channels of the stocks, at a temperature of the material that softens and splices the neighboring stocks,
wherein each stage of the stocks producing is ended with etching the tubular envelopes of the stocks.

2 more elements

Dependencies are inferred from the claim text.

Integral lens for high energy particle flow, method for producing such lenses and use thereof in analysis devices and devices for radiation therapy and lithography

Life of this patent

Integral lens for high energy particle flow, method for producing such lenses and use thereof in analysis devices and devices for radiation therapy and lithography

Life of this patent

Abstract

Claims12