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AssigneeSeiko Epson Corporation
InventorMutsumi Kimura
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The present invention provides an accurate and high-precision semiconductor device simulation method that is directed toward an electronic device whose physicality is not isotropic because the mobility of an organic thin film transistor, that employs an organic semiconductor, and the like, is highly dependent on field strength. In a semiconductor device simulation method which divides a semiconductor device of a two-dimensional structure or three-dimensional structure into meshes, and solves physical equations such as a potential equation and a carrier transport equation, for the meshes, a drift current resulting from an electric field and a diffusion current caused by a carrier density gradient are handled separately.
A semiconductor device simulation method comprising:
A semiconductor device comprising device parameters that are determined based on potential, carrier density and carrier flow density, said potential, said carrier density and said carrier flow being calculated by a semiconductor device simulation method which divides said semiconductor device of a two-dimensional structure or three-dimensional structure into meshes and solves physical equations including a potential equation and a carrier transport equation, for each of said meshes, and said semiconductor device simulation method calculating said potential, said carrier density and said carrier flow by applying separately a drift current resulting from an electric field and a diffusion current caused by a carrier density gradient.
A semiconductor device simulation method which divides a semiconductor device into a plurality of regions, and calculates device characteristics of the semiconductor device by solving physical equations which include a drift current term based on a drift current generated by carrier drift and a diffusion current term based on a diffusion current produced by diffusion of the carriers, for each of said divided regions, comprising:
Dependencies are inferred from the claim text.