Graphical user interface for allocating multi-function resources in semiconductor wafer fabrication and method of operation

A method of operating a resource allocator to allocate a plurality of multi-function resources among a plurality of tasks within a process system in semiconductor wafer fabrication, said process system capable of executing at least one application process, said method of operating said resource allocator comprising the steps of:

• monitoring measurable characteristics with a monitoring controller, said measurable characteristics associated with said at least one application process, said plurality of multi-function resources, and said plurality of tasks, wherein each of said measurable characteristics comprises one of:
• a status characteristic and a logistical characteristic;
• representing mathematically said plurality of multi-function resources and said plurality of tasks within a model of said process system, and defining relationships among related ones thereof as a function of said at least one application process;
• operating said model in response to ones of said monitored measurable characteristics, and allocating ones of said plurality of multi-function resources among ones of said plurality of tasks within said process system using a resource allocation controller to efficiently execute said at least one application process;
• and
• transforming process system information in a graphical user interface associated with said resource allocator into an audio-visual format to enable supervisory interaction.

A wetdeck process system in semiconductor wafer manufacturing, said wetdeck process system capable of executing at least one application process, said wetdeck process system comprising:

• a plurality of process subsystems;
• a plurality of tasks to be performed within said plurality of process subsystems;
• a plurality of multi-function resources;
• and
• a resource allocator that is operable to allocate said plurality of multi-function resources among said plurality of tasks, said resource allocator comprising:
• a monitoring controller that monitors measurable characteristics associated with said at least one application process, said plurality of multi-function resources, and said plurality of tasks, wherein each of said measurable characteristics comprises one of:
• a status characteristic and a logistical characteristic;
• a model of said wetdeck process system representing mathematically said plurality of multi-function resources and said plurality of tasks, and defining relationships among related ones thereof as a function of said at least one application process;
• a resource allocation controller that operates said model in response to ones of said monitored measurable characteristics, and allocates ones of said plurality of multi-function resources among ones of said plurality of tasks within said wetdeck process system to efficiently execute said at least one application process;
• and
• a graphical user interface associated with said resource allocator that is operable to transform process system information of said resource allocator into an audio-visual format to enable supervisory interaction.

A resource allocator operable to allocate a plurality of multi-function resources among a plurality of tasks within a wetdeck process, said wetdeck process capable of executing at least one wetdeck process plan, said resource allocator comprising:

• a monitoring controller that monitors measurable characteristics associated with said at least one wetdeck process plan, said plurality of multi-function resources, and said plurality of tasks, wherein each of said measurable characteristics comprises one of:
• a status characteristic and a logistical characteristic;
• a model of said wetdeck process representing mathematically said plurality of multi-function resources and said plurality of tasks, and defining relationships among related ones thereof as a function of said at least one wetdeck process plan;
• a resource allocation controller that operates said model in response to ones of said monitored measurable characteristics and allocates ones of said plurality of multi-function resources among ones of said plurality of tasks within said wetdeck process to efficiently execute said at least one wetdeck process plan;
• and
• a graphical user interface associated with said resource allocator that is operable to transform process system information of said resource allocator into an audio-visual format to enable supervisory interaction.

A method of operating a resource allocator to allocate a plurality of multi-function resources among a plurality of tasks within a wetdeck process, said wetdeck process capable of executing at least one wetdeck process plan, said method of operating said resource allocator comprising the steps of:

• monitoring measurable characteristics with a monitoring controller, said measurable characteristics associated with said at least one wetdeck process plan, said plurality of multi-function resources, and said plurality of tasks, wherein each of said measurable characteristics comprises one of:
• a status characteristic and a logistical characteristic;
• representing mathematically said plurality of multi-function resources and said plurality of tasks within a model of said wetdeck process, and defining relationships among related ones thereof as a function of said at least one wetdeck process plan;
• operating said model in response to ones of said monitored measurable characteristics, and allocating ones of said plurality of multi-function resources among ones of said plurality of tasks within said wetdeck process using a resource allocation controller to efficiently execute said at least one wetdeck process plan;
• and
• transforming process system information in a graphical user interface associated with said resource allocator into an audio-visual format to enable supervisory interaction.