Spatial light modulators with light absorbing areas
AssigneeReflectivity, INC
InventorsAndrew G. Huibers, Peter W. Richards
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Abstract
A projection system, a spatial light modulator, and a method for forming micromirrors are disclosed. A substrate comprises circuitry and electrodes for electrostatically deflecting micromirror elements that are disposed within an array of such elements forming the spatial light modulator. In one embodiment, the substrate is a silicon substrate having circuitry and electrodes thereon for electrostatically actuating adjacent micromirror elements, and the substrate is fully or selectively covered with a light absorbing material.
Claims140
A method for making a spatial light modulator, comprising:
- forming an array of circuitry and electrodes on a first substrate;
- forming a light absorbing layer on the first substrate to reduce reflections from the circuitry and/or electrodes on the substrate;
- forming an array of deflectable reflective elements on the first substrate or on a second substrate;
- and
- wherein the light absorbing layer is formed of a material that absorbs at least 50% of the light incident thereon and has a resistivity of from 2.5e12 ohm-cm to 1e15 ohm-cm.
A spatial light modulator, comprising:
- an array of circuitry and electrodes on a first substrate;
- a light absorbing layer on the first substrate to reduce reflections from the circuitry and/or electrodes on the first substrate;
- an array of micromirrors on the first substrate or on a second substrate;
- and wherein the light absorbing layer is formed of a material that absorbs at least 50% of the light incident thereon and has a resistivity of from 2.5e12 ohm-cm to 1e15 ohm-cm.
A method for making a spatial light modulator, comprising:
- providing a first substrate;
- forming an array of circuitry and electrodes on the first substrate;
- forming a light absorbing layer on the first substrate from a material that absorbs at least 50% of the light incident thereon and has a resistivity of from 2.5e12 ohm-cm to 1e15 ohm-cm;
- and
- forming an array of deflectable reflective elements on the first or on a second substrate;
- and if on the second substrate, bonding the first and second substrates together to form a substrate assembly.
A method for making a spatial light modulator, comprising:
- providing a first substrate and a second substrate;
- forming a plurality of electrodes each of which is associated with a circuitry of an array of circuitry on the second substrate;
- depositing a discrete light absorbing area on each of the electrodes to form coated electrodes;
- forming a plurality of deflectable reflective elements on the first or second substrate;
- and
- disposing the first and second substrates such that each deflectable reflective element is positioned proximate to a coated electrode such that the deflectable reflective element is capable of being electrostatically actuated by the coated electrode.
A method for making a spatial light modulator, comprising:
- providing a substrate;
- forming a plurality of electrodes each being associated with a circuitry of a plurality of circuitry on the substrate;
- depositing a discrete light absorbing area on each of the electrodes to form coated electrodes;
- and
- forming a plurality of deflectable reflective elements positioned above the coated electrodes.
A method for making a spatial light modulator, comprising:
- providing a first substrate and a second substrate;
- forming a plurality of electrodes each being associated with a circuitry of a plurality of circuitry on the second substrate;
- depositing light absorbing material to surround the electrodes such that the light absorbing material partially covers the second substrate;
- forming a plurality of deflectable reflective elements on the first substrate;
- and
- disposing the first and second substrates such that each deflectable reflective element is positioned proximate to an electrode such that the deflectable reflective element is capable of being electrostatically actuated by the electrode.
A method for making a spatial light modulator, comprising:
- providing a substrate;
- forming a plurality of electrodes each with associated circuitry on the substrate;
- depositing light absorbing material to surround the electrodes such that the light absorbing material partially covers the substrate;
- and
- forming a plurality of deflectable reflective elements positioned above the coated electrodes.
A method for making a spatial light modulator, comprising:
- providing a substrate;
- forming a plurality of circuitry and electrodes on the substrate;
- depositing and patterning a photoresist on the substrate so as to provide areas with and without the photoresist on the substrate;
- depositing a light absorbing material so as to fill the areas without photoresist with the light absorbing material;
- and
- removing the photoresist so as to leave selected areas on the substrate with light absorbing material.
A method for making a spatial light modulator, comprising:
- forming an array of circuitry and electrodes on a first substrate;
- forming a light absorbing layer on the first substrate to reduce reflections from the circuitry and/or electrodes on the substrate;
- and
- forming an array of deflectable reflective elements on the first substrate or on a second substrate;
- wherein the light absorbing layer is formed of a thin film ceramic, wherein the thin film ceramic is deposited by chemical vapor deposition or physical vapor deposition.
Dependencies are inferred from the claim text.