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US 6,958,818 B1Granted
Fabry-Perot interferometer including membrane supported reflector
AssigneeSilicon Light Machines Corporation
InventorAlexander Payne
Life of this patent
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Abstract
An interferometer comprises a membrane, a substrate, and a support structure. The membrane comprises a first reflector. The substrate comprises a second reflector. The support structure circumferentially couples the membrane to the substrate and orients the first reflector parallel to and facing the second reflector.
Claims20
An interferometer comprising:
- a) a membrane comprising a first reflector;
- b) a substrate comprising a second reflector;
- and
- c) a support structure circumferentially coupling the membrane to the substrate and orienting the first reflector of the membrane parallel to and facing the second reflector of the substrate,
- wherein the support structure maintains the membrane in bi-axial tension using first and second couplings to the substrate, the second coupling being further distant from the first reflector than the first coupling.
2 more elements
An interferometer comprising:
- a) a membrane maintained in biaxial tension comprising an annular member and a first multilayer stack of silicon and silicon dioxide encapsulated by first and second silicon nitride layers;
- b) a substrate comprising a silicon bulk material and a second multilayer stack of silicon and silicon dioxide;
- and
- c) a support structure coupling the membrane to the substrate and orienting the first multilayer stack of silicon and silicon dioxide parallel to and facing the second multilayer stack of silicon and silicon dioxide.
1 more element
An interferometer comprising:
- a) first means for reflecting maintained in biaxial tension;
- b) second means for reflecting coupled to the first means for reflecting, the first means for reflecting oriented parallel to and facing the second means for reflecting;
- and
- c) means for electrically biasing the first means for reflecting relative to the second means for reflecting.
1 more element
Dependencies are inferred from the claim text.