Method of utilizing dual-layer photoresist to form black matrixes and spacers on a control circuit substrate
AssigneeHannstar Display Corp.
InventorsChih-Chieh Lan, Hung-Yi Hung, Yu-Fang Wang
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Abstract
A method of utilizing dual-layer photoresist to form black matrixes and spacers on a control circuit substrate is provided. The dual-layer photoresist is composed of a layer of black resin and a layer of transparent photoresist. The black resin, of which optical density is greater than three, is mainly used to achieve the effect of black matrix. The transparent photoresist is mainly used to satisfy the needed cell gap between two transparent substrates.
Claims13
A method of utilizing dual-layer photoresist to simultaneously form black matrixes and spacers, comprising:
- forming a color filter layer on a control circuit substrate;
- forming pixel electrodes on the color filter layer to connect control devices on the control circuit substrate, respectively;
- forming a first photoresist on the control circuit substrate;
- performing a first soft baking step to soft-bake the first photoresist;
- forming a second photoresist on the first photoresist;
- performing a second soft baking step to soft-bake the second photoresist;
- simultaneously exposing the second photoresist and the first photoresist;
- simultaneously developing the second photoresist and the first photoresist to form spacers and black matrixes, wherein the spacers are located on supporting areas on metal lines of the control circuit substrate and the black matrix is on the control devices;
- and
- hard baking the second photoresist and the first photoresist.
A method of utilizing dual-layer photoresist to simultaneously form black matrixes and spacers on a control circuit substrate, comprising:
- forming a first photoresist on the control circuit substrate;
- performing a first soft baking step to soft-bake the first photoresist;
- forming a second photoresist on the first photoresist, wherein the first photoresist is one of a black resin and a transparent photoresist, and the second photoresist is the other one of the black resin and the transparent photoresist;
- performing a second soft baking step to soft-bake the second photoresist;
- simultaneously exposing the second photoresist and the first photoresist;
- simultaneously developing the second photoresist and the first photoresist to form spacers and black matrixes, whereby the spacers and the black matrixes are made by overlapping the first and the second photoresists;
- and
- hard baking the second photoresist and the first photoresist.
Dependencies are inferred from the claim text.