Electron-emitting device
AssigneesSumitomo Electric Industries, Ltd., Japan Fine Ceramics Center
InventorsYoshiki Nishibayashi, Yutaka Ando, Kiichi Meguro, Takahiro Imai
Life of this patent
Estimating the term…
Abstract
A method of manufacturing an electron-emitting element (20) for emitting electrons from diamond includes the first step of forming a diamond columnar member (25) on a diamond substrate (21), and the second step of forming an electron-emitting portion (30) having a base portion (36) and a sharp-pointed portion (32) which is located closer to a distal end side than the base portion (36) and emits the electrons by performing etching processing with respect to the columnar member (25).
Claims5
An electronic device comprising:
- an electron-emitting element manufactured by a method comprising:
- the first step of forming a monocrystalline diamond columnar member on a diamond substrate;
- and
- the second step of forming an electron-emitting portion having a base portion and a sharp-pointed portion which is located closer to a distal end side than the base portion and emits the electrons by performing etching processing with respect to the columnar member;
- and
- an electron extraction electrode placed to oppose the sharp-pointed portion, with a voltage being applied between said electron extraction electrode and said electron-emitting element, wherein the electron emitting portion has a polygonal cross section and a further intermediate portion located between the base portion and the sharp-pointed portion.
An electronic device comprising:
- an electron-emitting element manufactured by a method comprising:
- the first step of forming a monocrystalline diamond columnar member on a diamond substrate;
- and
- the second step of forming an electron-emitting portion having a base portion, a sharp-pointed portion for emitting the electrons, and a columnar intermediate portion located between the base portion and the sharp-pointed portion by performing diamond synthesis processing with respect to the columnar member;
- and
- an electron extraction electrode placed to oppose the sharp-pointed portion, with a voltage being applied between said electron extraction electrode and said electron-emitting element, wherein the electron emitting portion has a polygonal cross section and a further intermediate portion located between the base portion and the sharp-pointed portion.
Dependencies are inferred from the claim text.