Method for forming alignment pattern of semiconductor device

A method for forming an alignment pattern of a semiconductor device, the method comprising the steps of:

• i) forming a trench in each of a cell area, the peripheral circuit area, and the scribe line, a peripheral circuit area, and a scribe line of a silicon substrate;
• ii) depositing an oxide layer on an entire surface of the silicon substrate in such a manner that the trench formed in the cell area of the silicon substrate is filled with the oxide layer;
• iii) forming a trench isolation layer in the cell area and peripheral circuit area and scribe line of the silicon substrate by CMP with respect to the oxide layer;
• iv) forming an ion implantation mask for exposing predetermined portions of the cell area, the peripheral circuit area formed on the silicon substrate and a trench portion of the scribe line filled with the oxide layer;
• v) implanting impurities into an exposed portion of the silicon substrate, which is not covered with the ion implantation mask;
• vi) performing wet dipping for the oxide layer to a resultant structure of the silicon substrate so as to recess the oxide layer filled in the trench of the scribe line;
• and
• vii) removing the ion implantation mask.