Method for manufacturing liquid jet recording head

A method for manufacturing a liquid jet recording head which comprises an element substrate provided with a plurality of discharge energy generating elements for applying discharging energy to a recording liquid in accordance with image data, a liquid chamber for storing the recording liquid, and a top plate having a plurality of nozzles and which is formed by jointing the element substrate and the top plate so that each of the discharge energy generating elements faces the respective nozzle, the method comprising the steps of:

• forming, in an anisotropic-etching mask layer provided on a nozzle surface of the top plate, a compensation patterns extending over a portion of the top plate that is subsequently etched away to form the liquid chamber for storing the recording liquid;
• and
• over-etching the top plate by anisotropic etching using the compensation pattern as a mask to remove a part of the top plate masked by the compensation pattern prior to removing the compensation pattern to form the liquid chamber having a substantially rectangular shape at the nozzle surface of the top plate.