Method for removing a sacrificial material with a compressed fluid
AssigneeReflectivity, INC
InventorsJason S. Reid, Nungavaram S. Viswanathan
Life of this patent
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Abstract
A method comprises depositing an organic material on a substrate; depositing additional material different from the organic material after depositing the organic material; and removing the organic material with a compressed fluid. Also disclosed is a method comprising: providing an organic layer on a substrate; after providing the organic layer, providing one or more layers of a material different than the organic material of the organic layer; removing the organic layer with a compressed fluid; and providing an anti-stiction agent with a compressed fluid to material remaining after removal of the organic layer.
Claims122
A method comprising:
- depositing an organic material on a substrate;
- depositing additional material different from said organic material after depositing the organic material;
- and
- removing the organic material with a compressed fluid;
- wherein the released and movable additional material forms a micromirror for a display system or optical switch.
A method comprising:
- providing an organic layer on a substrate;
- after providing the organic layer, providing one or more layers of a material different than the organic material of the organic layer;
- removing the organic layer with a compressed fluid;
- and
- providing an anti-stiction agent to material remaining after removal of the organic layer with a compressed fluid.
A method for making a micromirror array, comprising:
- depositing and patterning an organic material on a substrate;
- depositing additional material different from said organic material after depositing the organic material;
- patterning said additional material to define a plurality of micromirror elements;
- and
- removing the organic material with a compressed fluid.
A method comprising:
- depositing an organic material on a substrate;
- depositing additional material different from said organic material after depositing the organic material;
- and
- removing the organic material, with a compressed fluid;
- wherein the released and movable additional material forms an accelerometer, DC relay, RF switch, filter, oscillator, variable capacitor, or inductor.
A method comprising:
- depositing an organic material on a substrate;
- depositing additional material different from said organic material after depositing the organic material;
- removing the organic material with a compressed fluid;
- wherein the organic material comprises a fluorocarbon or silicone;
- and
- wherein by removing the organic material, the additional material is released and is capable of movement.
A method comprising:
- depositing an organic material on a substrate;
- depositing additional material different from said organic material after depositing the organic material;
- and
- removing the organic material with a compressed fluid;
- wherein the additional material comprises silicon or a silicon compound.
A method comprising:
- depositing an organic material on a substrate;
- depositing additional material different from said organic material after depositing the organic material;
- and
- removing the organic material with a compressed fluid;
- wherein the additional material is a plurality of layers.
Dependencies are inferred from the claim text.