Semiconductor wafer support lift-pin assembly
AssigneeApplied Materials, Inc.
InventorsRudolf Gujer, Thomas K. Cho, Lily L. Pang, Michael P. Karazim, Tetsuya Ishikawa
Life of this patent
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Abstract
A modular lift-pin assembly includes a lift-pin having a distal end, a connector, and an actuator pin. The connector includes an actuator end having a plurality of catch fingers disposed around the actuator end. Each of the plurality of catch fingers includes a lip extending radially inwards. A lift-pin end is coupled to the distal end of the lift-pin, and the actuator pin is coupled to the actuator end of the connector.
Claims20
A module lift-pin assembly comprising:
- a lift-pin having a distal end;
- a connector, comprising:
- an actuator end having a plurality of catch fingers disposed around said actuator end, wherein each of said plurality of catch fingers includes a lip extending radially inwards;
- a lift-pin end coupled to said distal end of said lift-pin;
- and an actuator pin coupled to the actuator end of said connector.
A semiconductor wafer processing chamber, comprising:
- a substrate support platform having a centrally disposed recess;
- a base disposed above said centrally disposed recess;
- a substrate support disposed over said base;
- a plurality of lift-pin holes extending through said support platform, said base, said substrate support, and circumscribing said centrally disposed recess;
- a plurality of modular lift-pin assemblies slidably extending through said lift-pin holes;
- said modular lift-pin assemblies each comprising:
- a lift pin having a distal end;
- a connector, comprising:
- an actuator end having a plurality of catch fingers disposed around said actuator end, wherein each of said plurality of catch fingers includes a lip extending radially inwards;
- a lift pin end coupled to said distal end of said lift-pin;
- and
- an actuator pin coupled to the actuator end of said connector;
- and
- a lift-arm assembly disposed below said base and engaging said plurality of modular lift-pin assemblies.
The processing chamber of claim 18 wherein said actuator pins of said lift-pin assemblies are disposed on the wear pads.
Dependencies are inferred from the claim text.